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Oil-free Scroll Compressors for High Cleanliness in Wafer Cleaning and Etching

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  • Shipping Timeframes: All orders are processed within 2-5 business days (excluding weekends and holidays). After your order has been processed, the estimated delivery time is before 04 Feb, 2026, depending on customs, Please note that due to high demand, some items may experience longer shipping times, which will be communicated at order confirmation email.
  • Order Processing Time: Please allow 2-5 business days for us to process your order before it is shipped . Orders placed after 16:00 on Fridays, or during weekends and public holidays, will begin processing on the next business day. Processing times may be extended during peak seasons or sales events.
  • Manufacturing Time: Some products needs manufacturing time, the manufacturing process will take approximately 10-30 business days depending on the product. This timeframe may vary depending on the complexity of the product and current demand. but this will be communicated with you during order confirmation.
  • Returns and Exchanges: We offer a 30-day return policy for most items. If you are not completely satisfied with your purchase, you may return it within 30 days of receipt for a refund or exchange. Items must be unused, in their original packaging, and accompanied by proof of purchase. Return shipping costs are the responsibility of the customer, unless the item was damaged or defective upon arrival.
1. What is the air quality standard for the Oil-free Scroll Compressors?

The Oil-free Scroll Compressors meet the ISO 8573-1 Class 0 standard, ensuring 100% oil-free air quality.

2. What applications are these compressors suitable for?

These compressors are ideal for wafer cleaning in semiconductor manufacturing, etching processes in electronics production, and any application requiring high cleanliness air, including laboratories and pharmaceutical environments.

3. How does the variable speed drive (VSD) system contribute to energy savings?

The VSD system adjusts the compressor's speed based on the air demand, resulting in lower energy consumption and increased efficiency.

4. What is the noise level of these compressors?

The compressors operate at a noise level of ≤ 55 dB, making them compliant with cleanroom standards and suitable for quiet environments.

5. How reliable is the uptime of the compressors?

The compressors have a mean time between failures (MTBF) of ≥ 50,000 hours, with options for redundancy to ensure continuous operation.

6. Can the compressors be monitored remotely?

Yes, the compressors feature smart monitoring capabilities with Siemens PLC and IoT integration for remote monitoring.

7. What is the filtration accuracy of the compressors?

These compressors offer multi-stage filtration that can filter down to 0.01 μm, ensuring superior cleanliness in air supply.

8. What is the cooling method used in these compressors?

The Oil-free Scroll Compressors utilize an air-cooled cooling method, which is efficient and suitable for various environments.

9. What are the dimensions and weight of the compressors?

The compressors have external dimensions of 2540mm (L) x 540mm (W) x 770mm (H) and weigh approximately 120 kg.

10. What is the warranty period for the Oil-free Scroll Compressors?

The compressors come with a 1-year warranty, covering manufacturing defects and performance issues.

11. Is there a specific dew point requirement for these compressors?

Yes, the compressors can achieve a pressure dew point of ≤ -40°C, with an optional capability of -70°C for applications requiring extremely dry air.

12. What type of control system is integrated into the compressors?

The compressors are equipped with a Siemens PLC control system, enhancing reliability and ease of use.

13. Are there any maintenance requirements for these compressors?

The Oil-free Scroll Compressors are designed for low maintenance, reducing operational costs and downtime.

14. What is the air capacity of the compressors?

The compressors have an air capacity of 410 L/min, suitable for various industrial applications.

15. What are the power requirements for the compressors?

The compressors operate on AC power, with various models available for different voltage and frequency requirements.

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